Basic Info
Model NO.: CY-RF
Structure: Desktop
Certification: CE, TUV
Type: Reaction Type
Cooling: Air
RF Frequency: 13.56MHz
Trademark: CY
Specification: 500W
HS Code: 85141090
Customized: Customized
Material: Alloy
Application: School
Matching: Automatic
Output Type: N Type
Warranty: One Year
Transport Package: Wooden Box
Origin: Zhengzhou, China
Product Description
RF generator used in PECVD system
Introduction
13.56MHz RF generator upto 500W for DIY of PECVD (Plasma Enhanced Chemical
Vapor Deposition) for Plasma etching, Plasma cleaning, plasma polymerization etc.
SPECIFICATIONS
Noise | <50 dB |
Output Power | 5 -500W adjustable with ± 1% stability ( the power can be designed as your requirement) |
RF frequency | 13.56 MHz ±0.005% stability |
Reflection Power | 200W max. |
Matching | Automatic |
RF Output Port | 50 Ω, N-type, female |
Cooling | Air cooling |
Power | 208-240VAC, 50/60Hz |
Tube Size | 50 - 130 mm ( 2''- 5'' OD) ( larger diameter coil up to 11" diameter is available upon request ) |
Application | Combine with tube furnace to get PECVD system |
other details | can be desigbed as your requirement |
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