Ion source dual-target magnetron sputtering coater instrument is a special laboratory coating machine with four targets developed by our company. It is equipped with two DC power supply and two RF power supply. It can be used to prepare single or multi-layer ferroelectric thin films, conductive films, alloy films, semiconductor films, ceramic films, dielectric films, optical films, etc.
Ion source dual-target magnetron sputtering coater Features:
Compared with the conventional plasma sputtering, magnetron sputtering has the advantages of high energy, high speed, high deposition rate and low sample temperature rise;
The magnetron target is equipped with water-cooled interlayer. The water cooler can effectively take away heat and avoid heat accumulation on the target surface, so that the magnetron coating can work stably for a long time;
This model adopts the layout of under target, the sample table is on the top, and the height with the target surface can be precisely adjusted by program, and can be rotated and heated, with excellent performance.
Ion source dual-target magnetron sputtering coater instrument Technical parameter:
Product name | Ion source dual-target magnetron sputtering coater instrument |
Product model | CY-MSH500X-II-DCRF-SS |
Input | AC220V，50Hz |
Total power | 6KW |
Ultimate vacuum degree | 5x10-4Pa |
Sample table parameters | Size | 150 Dia. |
Height | 70 mm adjustable |
Heating | ≤850℃ |
Rotation speed | 1-20 rpm |
Magnetron sputtering head parameters | Quantity | four-set，2-inch |
Cooling mode | Water cooled，required flow rate10L/min |
Water chiller | 10L/min circulating water cooling |
Vacuum chamber | Size | 500mmDia. × 550mm H |
Material | Stainless steel |
Watch window | 100mm Dia. |
Open mode | front opening door |
Gas flow controller | 1channel 200sccm Ar； |
Vacuum pump | Molecular pump system pumping,1200L/S |
Film thickness gauge | Quartz vibrating film thickness gauge ， one set，Resolution 0.10 Å |
Sputter power supply | DC power supply：two set，500W，for metal films RF power supply：two set，500W，for non-metallic films |
Operating mode | CYKY self-developed professional control system |
Overall dimensions | 1250mm X 1000mm X2000mm |
Total weight | 500kg |
