12-inch PTFE chamber anti-corrosion spin coater

CY-SPC12-PTFE spin coater is with vacuum chuck designed for easy and quick coating via sol-gel for wafers up to 12" diameter. This spin coater adopts advanced precision motor, the maximum speed can reach 5000rpm, which effectively guarantees the uniformity of film formation. Besides, the instrument adopts touch screen control, can preset the coating curve, which greatly simplifies the process.

Spin coater application:

Liquid or colloidal materials can be coated on silicon wafers, crystals, quartz, ceramics and other substrates to form thin films, mainly used in photoresist spin coating, biological medium production, sol-gel method for polymer film production, etc.

Technical parameters：