Economic temperature control type spin coater is capable of precise temperature control of the turntable with contact heating of the substrate to achieve temperature-controlled spin coating processing at different temperatures. Using the unique invention patent rotating hot plate temperature control structure system has high temperature control precision, good repeatability, advanced technology and excellent performance.
Economic temperature control type spin coater product performance parameter:
Heating turntable: Φ50mm
Temperature control range: chamber temperature ~ 150°C
Temperature resolution: 0.1°C
Temperature control accuracy: ±0.5°C (temperature control after stabilization)
Rotating speed resolution: ±1RPM
Rotating speed range: 100-5000RPM
Acceleration range: 100-5000RPM/S
Single step setting duration: 0.1-3000S
Programmable: 100 groups of 100 steps
Automatic dispensing port: one way
Equipment weight: 15kg
Power input: AC220V, 5A
Heating power: 150W
Motor power: 200W
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