Desktop thermal evaporation coater with electric lifting sample platform

Product Name

Desktop   thermal evaporation coater with electric lifting sample platform

Product Model

CY-EVP195S-1S-LT（T means tall tank ；L means   lift）

Installation Condition

1、Working   environment temperature: 25℃±15℃，humidity: 55%Rh±10%Rh；

2、Equipment   power supply：AC220V，50Hz， must be well grounded；

3、Rated power：2500w；

4、Equipment for   gas ：The equipment   chamber should be filled with argon gas for cleaning. The customer should   prepare argon gas with purity ≥99.99%.

5、Table size   requirements: 600mm×600mm×700mm，bearing capacity ≥ 70kg；

6、The position   should be well ventilated and cooled.

Technical Indicators

1、  Number of evaporation sources: 2, each   evaporation source is equipped with baffle;

2、 Evaporation source voltage: 10V

3、 The evaporation current is continuously adjustable   from 0 to 100A

4、 With 1 tungsten boat,1 tungsten basket;

5、 Stainless steel electric lifting sample platform,   diameter is 100mm, rotating speed 1~20rpm continuously adjustable;

6、 The distance between the sample and the evaporation   source is continuously adjustable from 190 to 300mm, and can also be adjusted   up and down under the vacuum state;

7、 The vacuum cavity is a stainless steel cavity with   an outside diameter of 195mm ,  an   inside diameter 185mm and a height of 350mm;

8、 The   upper cover is sealed with ISO flange for easy disassembly and   inspection; 

9、 The cavity is provided with a front door and a   quartz observation window with a baffle ;size   ofφ60mm

10、 The air pumping interface of the vacuum chamber is   KF40;

11、 Air intake interface is 1/4 inch double ferrule   joint ,stainless steel fine-tuning valve is provided by default to   adjust the air intake;

12、 Touch screen is 7inch color touch screen;

13、 Adjustable sputtering current ，sputtering safety current value and safety vacuum   value can be set；

14、  safety protection: over current, vacuum is too   low automatically cut off the sputtering current;

15、 Ultimate vacuum：1Pa(matching double stage rotary vane pump)；

Notice

1、In order to give full play to the vacuum performance of the cavity, it   is recommended to use it with molecular pump group.

Optional accessory

Film

thickness Monitor

1、Film thickness   resolution：0.0136Å（aluminum）

2、Accuracy of   film thickness ：±0.5%，it depends on   process conditions, especially sensor position, material stress, temperature   and density  

3、Measuring   speed：100ms to 1s   per times ，measurement   range can be set ：500000Å（aluminum）

4、Standard   sensor crystal：6MHz

5、Suitable for   wafer frequency：6MHz

suitable for wafer size：Φ14mm

mounting flange：CF35

Another Accessory

1、 tungsten boat, tungsten basket;

2、 Organic evaporation source (including quartz boat   and tungsten wire heating source)

3、 The number of evaporation sources can be selected   1~2 groups;

4、 CY-CZK103 series high performance molecular pump   set(including composite vacuum gauge, measuring range 10-5Pa~105Pa);

CY-GZK60 series small   molecular pump set(including composite vacuum gauge, measuring range   10-5Pa~102Pa)

VRD-4 bipolar rotary vane vacuum pump；

5、 CW3000 circulating water cooler(air cooled ,flow   rate 10L per minute)

6、 KF40 Vacuum bellows; The length can be 0.5m, 1m or   1.5m. KF40 clamp bracket;

7、 Film thickness meter crystal oscillator;