This furnace is a compact magnet driven sliding 2" tube furnace with a max. working temperature of 1200°C, which is designed for direct vaporizing deposition (DVD) or rapid thermal processing (RTP) under various atmosphere for 2D material growth.
Basic Info
Model NO.: CY-OTF-1200X-S-DVD
Structure: Desktop
Certification: CE, TUV
Type: Heating Type
Max.Heating Rate: =<20c/Min.
Heating Element: Resistance Wire
Tube Size: Customized
Trademark: CY
Specification: OD. 50mm
HS Code: 85141090
Customized: Customized
Material: Steel
Application: Lab
Max.Temperature: 1200c
Temperature Accuracy: +/-1c
Vacuum Flange: Stainless Steel
Warranty: One Year
Transport Package: Wooden Box
Origin: Zhengzhou, China
Product Description
1200℃ Compact Magnet Driven Sliding Tube Furnace for DVD & RTP / atmosphere tube furnace
This is a compact magnet driven sliding 2" tube furnace with a max. working temperature of 1200°C, which is designed for direct vaporizing deposition (DVD) or rapid thermal processing (RTP) under various atmosphere for 2D material growth.
Specifications
Furnace Feature | One high thermal conductivity AlN flat sample holder (2"Lx1"W) is fixed on K type sample, andthe thermal couple with the sample holder can be moved inside quartz tube driven by a magnet manually to find desirable temperature position inside tube for evaporation or deposition. One NIST certified precision temperature monitor is connected to thermal couple and sample holder via a feedthrough on the vacuum flange. One magnet is embedded inside thermal block, and another magnet is placed outside tube. move the outside magnet can move the sample holder with thermal couple inside tube in or out 30 segment programmable temperature controller is built in furnace to set up max. working temperature up to 1200oC at center of furnace One small quartz crucible is included , which can be used to contain evaporation material or please wafer on top for deposition based on your application. |
Furnace Power | 110VAC or 208 - 240 VAC, 50/60Hz (Please confirm voltage when place order ) 1.5 KW |
Max. Temperature | 1200°C (<1 hour) |
Continuous Temperature | 1100°C ( continuous) |
Max. Heating Rate | <= 20 °C/min |
Heating Zone | Heating Zone Length: 8" (200mm), single zone. The following picture shows the temp. distribution across the heating zone, please click to enlarge. Constant Temp. Zone: 2.3" (60mm) (+/-1°C) @ 1000 °C You shall measure furnace temperature profile for your own application before making film growth. |
Temperature Controller | PID automatic control via solid state relay with 30 steps programmable Built in Over Temperature and Thermocouple Failure Protection Optional: The furnace may be operated by PC with installing a control module. |
Temperature Accuracy | +/- 1°C |
Heating Elements | Fe-Cr-Al Alloy doped by Mo |
Tube Size | 2" quartz tube (50mm O.D x 44mm I.D x 800mm L) Two fibrous ceramic tube blocks are included for blocking heat radiation from tube chamber. (Ceramic blocks must be fully inserted into the furnace chamber before heating) One small quartz boats is included for placing sample or evaporation materials. |
Vacuum Flanges | 2" default flange with 1/4'' Bard fittings, 1/4'' tube feedthrough port (for 1/4" O.D thermocouple insert) and a KF25 vacuum port |
Vacuum Level | 10-2torr (by mechanical pump) |
Dimensions | With lid close: 1055mm(L) × 300mm(W) × 400mm(H) With lid open: 1055mm(L) × 300mm(W) × 560mm(H) |
Net Weight | 22 Kg |
Shipping Package Size | 48''(L) x 24''(W) x 28''(H) |
Shipping Weight | 120 lbs |
Warranty | One year limited warranty |
Compliance | CE Certified |
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