Multi-arc ion plating is the use of gas discharge or partial ionization of evaporated substances, while gas ions or particles of evaporated substances are bombarded, the evaporated substances or reactants are deposited on the substrate. Ion plating combines the glow discharge, plasma technology and vacuum evaporation organically, which not only significantly improves the film quality, but also expands the application range of the film. It has the advantages of fast evaporation rate, strong film adhesion, good diffraction, and extensive film materials. It is very suitable for plating hard protective film such as TiN. At the same time, because it can change the color of the film by controlling the atmosphere, and the film is firmly combined with the substrate, it can also be used to make decorative films of various colors.
Features of multi arc ion coating equipment
This equipment is equipped with two multi-arc targets, which are placed on both sides of the chamber. Cooperating with the planetary sample stage can effectively improve the coating efficiency and improve the effect.
The coating instrument also adopts an integrated design, the chamber and the electric control part are separated on the left and right, which realizes the separation of water and electricity, and effectively guarantees the safety of users.
Technical parameters of multi arc ion coating equipment:
Model | CY-MIOP500S-2TA |
Vacuum chamber | Water cooled stainless steel chamber; φ500mm x 490mmH; Front door type, φ 100 mm quartz observation window; Built in two sets of infrared heating lamps, can be used for baking and degassing the chamber; Multiple CF interfaces are reserved for installation of multi-channel film thickness meter |
Gas system | Mass flow meter: Ar gas 0~200sccm, N2 gas 0~200sccm other flow or gas can be customized |
Power supply | AC 220V;50Hz;10kW |
Control system | 15" touch screen configuration control software |
Multi arc target | Quantity and SPEC | 2-set;3inches |
Installation method | Chamber side, opposite |
Working current | 0~150A |
Target thickness | 50mm, Min. 20mm |
Sample stage | Specification | Planetary hanger |
Number of samples | There are 6 hanging points on each hanger, totally 6 hangers |
Rotation speed | Revolution speed 1~20rpm |
Vacuum system | Model | CY-GZK103-A |
Molecular pump | Turbo molecular pump |
Backing pump | Double stage rotary vane pump |
Pumping | molecular pump: 600L/S | Comprehensive pumping performance: 30 minutes vacuum degree up to: 5×10E-3Pa |
Rotary vane pump: 1.1L/S |
Ultimate vacuum | 5×10E-4Pa |
Extraction interface | KF40 |
Exhaust interface | KF16 |
Vacuum measurement | Composite vacuum gauge |
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