Compact plasma sputtering &evaporation coater with thin film monitor and vacuum pump-CY-1100X-SPC-16H

Target dimension

Φ50mm

Sample stage

Φ50mm

Chamber dimension

Φ160*110mm

Vacuum degree

10Pa~10-3Pa

Maximum amper

50mA

Max setting time

9999s

Max voltage

1600VDC,adjustable

Vacuum pump

Rotary vacuum pump: 10-100Pa
     Turbo pump system: 10-3Pa

Thin film monitor power

DC 5V, 400mA

Resolution

±0.03Hz(5-6MHz),0.0136Å (Al)

Accuracy

±0.5% thickness+1

Measured speed

100mS~1s/Time, adjustable

Measured range

500000Ã(Al)

Sensor type

Quartz 6MHz

Display

LED Display include

Analog output

8 bite PWM output

Working voltage

AC 220V, 50Hz