3 Rotary Target Plasma Sputtering Coater with Substrate Heater

3 Rotary Target Plasma Sputtering Coater with Substrate Heater

3 rotary target plasma sputtering coater is a compact three rotary target plasma sputtering coater with a touch screen digital controller, and a substrate heater capable of heating up to 500 °C. It can coat 1-3 types of metallic materials to sample with the diameter up to 50 mm.Three sputtering targets: gold, silver, copper are included for immediate use.

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3 rotary target plasma sputtering coater is a compact plasma thin film sputter (DC common type). The control panel adopts the touch screen mode. The substrate has a limit of 2", the sample is placed with a diameter of Ø50mm and the heating temperature is 500℃.3 rotary target plasma sputtering coater can sputter gold, silver and copper targets, and can not sputter light metals and carbon. This machine uses a rotating sample stage to sequentially coat three layers on the same sample.The film is suitable for the preparation of samples in the laboratory.

3 rotary target plasma sputtering coater specifications:

Input Power	Single phase 220 VAC, 50 / 60Hz 700 W (including vacuum pump) For using 110 VAC, we will include a transformer for you.
Output Power	1600 VDC,40 mA max
Vacuum Chamber	Vacuum chamber: 150 mm ID×165mm OD×150 mm H, made of high purity quartz Sealing flange made of stainless steel with flat O-ring
Sample Stage with Heater	Stage size: 50 mm Dia. Sputtering distance range: 25 –40 mm adjustable Rotatable stage with three sputtering positions (controlled by the touch screen) Substrate heater is built-in with a maximum heating temperature of 500 °C PID temperature controller with +/- 1 °C accuracy is integrated into the touch screen
Control Panel	6” color touch screen with PLC integration for easy operation Vacuum gauge, sputtering current meter, and substrate temperature control are integrated to the touch screen panel Adjustment knobs on the front panel for gas intake and sputtering current control Sputtering position, sputtering timer, and process logging are accessible from the touch screen
Shield	Stainless steel shield cage is included for extra protection
Sputtering Targets	Target size requirements: 47 mm Dia.×2.5 mm max Three targets are included in the standard package for immediate use: Au target, 47 mm Dia.×0.12 mm Ag target, 47 mm Dia.×0.5 mm Cu target, 47 mm Dia.×2.5 mm You may order various targets at CYKY
Dimensions	440 mm L × 330 mm W × 455 mm H
Net Weight	50 kg
Warranty	One year limited with lifetime support
Notes	HIGH VOLTAGE! Sputtering heads connect to high voltage. For safety, the operator must shut down the equipment before sample loading and target changing operations This model is not suitable for coating light metallic material such as Al, Mg, Zn, Ni, etc. due to low energy. Please consider our magnetron sputtering coater or thermal evaporation coater.