This type of plasma sputtering machine adopts two-pole sputtering method, which is widely used for SEM sample preparation or metal coating test. Using low-temperature plasma sputtering process, there is no high temperature during the coating process, and it is not easy to produce thermal damage. This small plasma sputtering coater uses PLC control system, all touch screen operation, easy to learn and use. This equipment is equipped with a transposition autorotating sample stage. Users can realize one-key transposition on the touch screen. The sample stage can be freely switched between two target positions. After it is in place, the sample stage can also rotate to enhance the uniformity of the coating. In addition, customers can choose a crystal oscillator type film thickness meter to monitor the film thickness to improve the accuracy of the coating.
This equipment is small in size and beautiful in appearance and powerful in function. It is the best choice for laboratory coating test.
Technical parameters:
Item | Detail |
Product model | CY-PLZ180-II-DC-Q |
Sample stage | Diameter φ60mm, can automatically switch between two target positions |
DC sputtering head | 2"x1 |
Chamber material | High purity quartz |
Chamber size | φ180mm x 150mm |
Vacuum pump | Rotary vane pump |
Ultimate vacuum | 1.0E-1Pa |
Vacuum interface | KF16 vacuum flange |
Gas inlet | φ 6.35 ferrule connector |
Power supply | AC 220V 50Hz |
Total power | 1.5KW/2KW (rotating heating) |
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