Lab Atmosphere Controlled Antiseptic Spin Coating Machine is suitable for surface coating processes such as semiconductors, chemical materials, silicon wafers, wafers, substrates, and conductive glass. This machine can be used for the preparation of coating film of strong acid and strong alkaline coating solution.
Lab Atmosphere Controlled Antiseptic Spin Coating Machine is an atmosphere-controllable spin coater with Polypropylene air tighten, which can make spin coating either under vacuum or inert gas atmosphere. The sample holder is included for coating wafer upto 6". The digital control box is separated from spin coater which allows you operate in the remote location. The spinning speed is variable from 500-6000 rpm with two programmable segments. The package includes the two-stage vacuum pump , digital vacuum gauge and 20ml syringe for immediate use.
Lab Atmosphere Controlled Antiseptic Spin Coating Machine is suitable for surface coating processes such as semiconductors, chemical materials, silicon wafers, wafers, substrates, and conductive glass. This machine can be used for the preparation of coating film of strong acid and strong alkaline coating solution. The spin coater works by vacuum adsorption to fix the sample on the sample tray. The device can store 12 sets of programs, each of which contains 6 operating stages. The number of rotations of the equipment in different operation stages is different, so that the equipment slowly increases the speed to the limit speed, which is favorable for the film material to be uniformly formed on the surface of the sample without excessive waste and material saving. The upper cover of the chamber can heat the sample, facilitating the coating process of the dense film material. The spin coater has the advantages of simple operation, convenient cleaning, small size, etc. It is mainly used in the process of film formation in the laboratories of universities and research institutes
1. There are 12 groups of programs, each group consisting of 6 running stages.
2. The sample is fixed by vacuum adsorption, which is easy to operate.
3. The vacuum can reach -0.08Mpa.
4. Use the positioning tool to easily position the sample in the center to reduce vibration or flying debris caused by eccentricity.
5. Different suction cups can be used according to the sample specifications, and the replacement is convenient and simple.
6. The motor starts quickly and stably, which ensures the consistency and uniformity of the coating thickness.
7. This unit can be used in a glove box, but the control part and vacuum pump should be placed outside the box.
8. Can be coated under an inert gas atmosphere.
9. It can be coated under vacuum. In this state, the coating needs to be bonded to the substrate.
Input Power |
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Spin Speed |
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Vacuum | Max. vacuum level for the system is 900 m-torr |
Motor | 24VDC, Brushless, 200W max. |
Net Weight | 25 kg |
Compliance | CE Certified |
•Case and the spin disk made of Polypropylene (PP) to resist most of the corrosive solutions.
•The digital vacuum gauge is installed on the top cover of the spin coater
•The digital control box is separated from spin coater.
•One filter is included in standard package. It is used to connect the pump and coater for preventing wastewater from flowing into the pump.
•The sample can be held either by the mechanical fixture (vacuum injection or vacuum (for inert gas)
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