Cabinet type corrosion resistant spin coater has the advantages of simple operation, convenient cleaning, small size, etc. It is mainly used in the process of film formation in the laboratories of universities and research institutes.
Cabinet type corrosion resistant spin coater product features:
1.Corrosion-resistant PP full cabinet independent mixing station
2.Waste glue collection at the bottom and ventilation at the top
3.Upgradeable automatic dispensing function for industrial production
4.Integrated touch screen control, up and down mobile transparent viewing window
5.Using servo motor system, stable performance and meeting industrial requirements
Cabinet type corrosion resistant spin coater product parameters:
1.Spin coating program: store up to 100 groups of programs, each group has 100 steps, each step can be accurate to 0.1 seconds
2.Rotation speed: 0-5,000 rpm (higher speed optional), considering the safety of heavy or large spin coating,it is limited to 5000 rpm
3.Spin coating acceleration: 0-10,000 rpm / sec (higher optional), considering the safety of heavy or large spin coating, it is limited to 10000 rpm / s
4.Motor spin coating speed stability error: < ±1rpm
5.Speed adjustment accuracy and repeatability: 1rpm
6.Process time setting: 0-3,000 sec/step, time setting accuracy: 0.1sec
7.Support wafer size 25px-300mm (12" round crystal)
8.Spin coating uniformity: < ±3% in the range of 6 inches (need to remove edge 3 mm 9.area to measure)
10.Can be equipped with multi-channel automatic dispensing function, dispensing flow rate 0.006-990ml/min is adjustable
11.Three sizes of vacuum carrier are available as standard, other sizes can be customized
