CY-SPC-HUA6 is a small and flexible spin coater, which can spray the glue on the substrate through the ultrasonic nozzle, and then evenly apply the glue on the substrate through high-speed rotation. It is also possible to directly perform the spin coating operation alone.
CY-SPC-HUA6 is a small and flexible spin coater, which can spray the glue on the substrate through the ultrasonic nozzle, and then evenly apply the glue on the substrate through high-speed rotation. It is also possible to directly perform the spin coating operation alone.
1. The chamber is equipped with heating elements, which can be baked after spinning coating
2. The product has a gas path controlled by a 2-way float flowmeter, which can pass inert gas into the chamber to protect the glue liquid from the gas in the air when spinning coating
3. This machine is suitable for surface coating of semiconductor wafer, slide, wafer, substrate, ITO conductive glass and other processes and plate making.
4. The maximum size of the crystallizable wafer is 6 inches, the rotational speed can reach 10000rpm, and the acceleration can reach 5000rpm;
5. It has the advantages of stable speed, quick start, convenient operation, etc., and can ensure the consistency and uniformity of the thickness of spinning coating.
1. Adopt DC brushless motor, single chip microcomputer control
2. High-definition touch screen control
3. Single step and multi-step spinning coating operation can be carried out, five programs can be stored, and each program can be set with five steps of operation
4. Anti-blocking glue design
5. Aluminum alloy chamber, durable
6. It has various auxiliary functions such as ultrasonic, atmosphere, heating and so on, which can be used for spinning coating research
Spin coater | Name | ultrasonic assisted atmosphere spin coater |
Substrate size | 6inches | |
Rotation speed | 100~10000rpm adjustable | |
Rotational acceleration | 100~5000rpm/s adjustable | |
Longest spinning time(a single time) | 3000s | |
chamber size | Φ200mm* 90mm | |
Voltage | 220V 50Hz | |
Power | 400W | |
Heating Temp | 0-100℃ | |
Warranty | 1 year, life-long technical support, excluding vulnerable parts | |
Ultrasonic system | Atomizing head Material | Titanium alloy |
Frequency | 40kHz | |
Power | 130W | |
Flow | 0.55mL/s | |
Particle diameter | 25um | |
Atomizing head type | Cone type | |
Atomizing head weight | 0.3kg | |
Ultrasonic power supply | Size:315*312*135mm,weight:5kg | |
Syringe pump | Flow range | 0.001uL/min-43.349mL/min |
Power down memory function | Save the setting parameters, no need to set them after power on again | |
Injector | 10uL-1000uL | |
Syringe | 1mL-60mL | |
Linear speed range | 5um/min-65um/min | |
Linear speed adjustment resolution | 5um/min | |
Maximum stroke | 140mm | |
Travel resolution | 0.156um | |
Rated linear thrust | >90N | |
Flowmeter | Control gas type | 2 |
Gas flow rate | 16-160mL/min |
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