CY-EZ4 is CE certified compact spin coater with vacuum chucks designed for easy and quick coating via sol-gel for wafers up to 4" diameter.The spinning speed is variable from 100-10000rpm with two programmable segments
Features
1.75w brushless dc motor,single chip microcomputer control
2.High-definition display
3.Pre-set single or multi-step coating operate
4.Prevent glue blocking design
5.PP anti- corrosion chamber, replaceable
6.HDPE vacuum adhesive disc
Model No. | EZ4 |
Chamber dimension | Φ200mm |
Maximum sample | 10mm-100mm |
Speed range | 100~9999rpm adjustable |
Accelerated speed | 100~9999rpm/s |
Speed resolution | 1rpm |
Speed accuracy | < ±5rpm |
Control | 5 sets programmable control,each sets with 5 steps |
Motor power | Brushless DC Motor 75w |
Working voltage | AC 110-220V, 50Hz |
Outer dimension | 250*210*200mm |
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