Silicon (Si (P-type)) Sputtering Targets
Silicon is one of the most extensively used elements in the world. It is dark gray and semi-metallic with a bluish tinge. It has a melting point of 1,410°C, a density of 2.32 g/cc, and a vapor pressure of 10-4 Torr at 1,337°C. It is a brittle metalloid which can chip easily. Silicon is a semiconductor which is heavily utilized in the electronics and computer industries. It is often doped with arsenic, phosphorus, or boron depending on the application. It is evaporated under vacuum for circuit device, data storage device, and battery fabrication.
Material Type | Silicon (P-type) |
Symbol | Si (P-type) |
Atomic Weight | 28.0855 |
Atomic Number | 14 |
Color/Appearance | Dark Gray with a Bluish Tinge, Semi-Metallic |
Thermal Conductivity | 150 W/m.K |
Melting Point (°C) | 1,410 |
Bulk Resistivity | 0.005-0.020 OHM-CM |
Coefficient of Thermal Expansion | 2.6 x 10-6/K |
Theoretical Density (g/cc) | 2.32 |
Dopant | Boron |
Z Ratio | 0.712 |
Sputter | DC, RF |
Max Power Density (Watts/Square Inch) | 40* |
Type of Bond | Indium, Elastomer |
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