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Silicon Dioxide (Fused Quartz) (SiO2) Sputtering Targets

Silicon Dioxide (Fused Quartz) (SiO2) Sputtering Targets

    Silicon Dioxide (Fused Quartz) (SiO2) Sputtering Targets


Silicon dioxide, also known as silica, has a chemical formula of SiO2. It has a melting point of 1,610°C, a density of 2.648 g/cc, and a vapor pressure of 10-4 Torr at 1,025°C. Silicon dioxide is commonly found in nature as sand or quartz. It is primarily used in the production of glass for windows and beverage bottles. It is evaporated under vacuum for the fabrication of optoelectronic and circuit devices.

Silicon Dioxide (Fused Quartz) (SiO2) Specifications:

Material Type

Silicon (IV) Oxide

Symbol

SiO2

Color/Appearance

White, Crystalline Solid

Melting Point (°C)

1,610

Theoretical Density   (g/cc)

~2.65

Z Ratio

**1.00

Sputter

RF

Max Power Density

(Watts/Square Inch)

30*

Type of Bond

Indium, Elastomer

Comments

Quartz excellent in   E-beam.

 


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