Tantalum Oxide (Ta2O5) Sputtering Targets
Tantalum oxide is an inorganic chemical compound with a chemical formula of Ta2O5. It is crystalline solid and white in appearance with a density of 8.2 g/cc, a melting point of 1,872°C, and a vapor pressure of 10-4 Torr at 1,920°C. It is mainly used to produce capacitors which can be found in auto electronics, cell phones, and tools. Tantalum oxide can also be found in the glass for camera lenses. It is evaporated under vacuum to form films for the fabrication of semiconductors, optoelectronic devices, and fuel cells.
Material Type | Tantalum Pentoxide |
Symbol | Ta2O5 |
Color/Appearance | White, Crystalline Solid |
Melting Point (°C) | 1,872 |
Theoretical Density (g/cc) | 8.2 |
Z Ratio | 0.3 |
Sputter | RF, RF-R |
Max Power Density (Watts/Square Inch) | 20* |
Type of Bond | Indium, Elastomer |
Comments | Slight decomposition. Evaporate Ta in 10-3 Torr O2. |
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