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Titanium Dioxide (TiO2) Sputtering Targets

Titanium Dioxide (TiO2) Sputtering Targets

    Titanium Dioxide (TiO2) Sputtering Targets


Titanium dioxide is a chemical compound with a chemical formula of TiO2. It is white in appearance with a density of 4.26 g/cc, a melting point of 1,830°C, and a vapor pressure of 10-4 Torr at ~1,300°C. The largest commercial application of titanium dioxide is as a white pigment for paint due to its brightness and high refractive index. It is also a principal ingredient in sunscreen because of its unique ability to absorb UV light. It is evaporated under vacuum primarily for reflective optical coatings and optical filters.

 

Titanium Dioxide (TiO2) Specifications

Material Type

Titanium (IV) Oxide

Symbol

TiO2

Color/Appearance

White-Beige, Gray-Black

Melting Point (°C)

1,830

Theoretical Density   (g/cc)

4.23

Z Ratio

0.4

Sputter

RF, RF-R

Max Power Density

(Watts/Square Inch)

20*

Type of Bond

Indium, Elastomer

Comments

Suboxide, must be   reoxidized to rutile. Ta reduces TiO2 to TiO and Ti.

Material Type

Titanium (IV) Oxide


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