Titanium Dioxide (TiO2) Sputtering Targets
Titanium dioxide is a chemical compound with a chemical formula of TiO2. It is white in appearance with a density of 4.26 g/cc, a melting point of 1,830°C, and a vapor pressure of 10-4 Torr at ~1,300°C. The largest commercial application of titanium dioxide is as a white pigment for paint due to its brightness and high refractive index. It is also a principal ingredient in sunscreen because of its unique ability to absorb UV light. It is evaporated under vacuum primarily for reflective optical coatings and optical filters.
Material Type | Titanium (IV) Oxide |
Symbol | TiO2 |
Color/Appearance | White-Beige, Gray-Black |
Melting Point (°C) | 1,830 |
Theoretical Density (g/cc) | 4.23 |
Z Ratio | 0.4 |
Sputter | RF, RF-R |
Max Power Density (Watts/Square Inch) | 20* |
Type of Bond | Indium, Elastomer |
Comments | Suboxide, must be reoxidized to rutile. Ta reduces TiO2 to TiO and Ti. |
Material Type | Titanium (IV) Oxide |
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