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Zirconium (Zr) Sputtering Targets

Zirconium (Zr) Sputtering Targets

    Zirconium (Zr) Sputtering Targets


Zirconium is a classified as a transition metal on the Periodic Table. It has a density of 6.49 g/cc, a melting point of 1,852°C, and a vapor pressure of 10-4 Torr at 1,987°C. It is silvery-white in appearance and its propensity for corrosion resistance makes it heavily used by the chemical industry. Zirconium can be found in surgical appliances, superconductive magnets, and the cladding of nuclear reactors. It is also utilized as an alloying agent for steel. Its compound, zirconia, is often a substitute for diamonds in jewelry. Zirconium, along with its alloys and compounds, is evaporated under vacuum for optical coatings, semiconductors, and data storage devices.

Zirconium (Zr) Specifications

Material Type

Zirconium

Symbol

Zr

Atomic Weight

91.224

Atomic Number

40

Color/Appearance

Silvery White, Metallic

Thermal Conductivity

22.7 W/m.K

Melting Point (°C)

1,852

Coefficient of Thermal   Expansion

5.7 x 10-6/K

Theoretical Density   (g/cc)

6.49

Z Ratio

0.6

Sputter

DC

Max Power Density

(Watts/Square Inch)

50*

Type of Bond

Indium, Elastomer

Export Control (ECCN)

1C234

Comments

Alloys with W. Films   oxidize readily


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