Zirconium Oxide (ZrO2, Fully stabilized 8mol% Y2O3) Sputtering Targets
Zirconium oxide is a chemical compound with a chemical formula of ZrO2. It is often referred to as zirconia. It is white in appearance with a melting point of ~2,700°C, a density of 5.89 g/cc, and a vapor pressure of 10-4 Torr at ~2,200°C. Due to its resistance to cracks, zirconium oxide is heavily utilized for ceramic production. Cubic zirconia, which is zirconium oxide in cubic crystalline form, is sold by jewelers as a low-cost alternative to diamonds. Zirconium oxide is evaporated under vacuum for optical coatings, semiconductors, and fuel cells.
Material Type | Zirconium Oxide |
Symbol | ZrO2 |
Color/Appearance | White, Solid |
Melting Point (°C) | ~2,700 |
Theoretical Density (g/cc) | 5.89 |
Z Ratio | **1.00 |
Sputter | RF, RF-R |
Max Power Density (Watts/Square Inch) | 20* |
Type of Bond | Indium, Elastomer |
Export Control (ECCN) | 1C234 |
Comments | Films oxygen deficient, clear and hard. |
Copyright © Zhengzhou CY Scientific Instrument Co., Ltd. All Rights Reserved Update cookies preferences
| Sitemap | Technical Support: